Showerhead

The showerhead (also known as gas distribution plate) is a core critical component of semiconductor etching, CVD, and ALD equipment. It primarily achieves uniform distribution of process gases onto the wafer surface, and its machining quality directly determines the uniformity of etching and thin-film deposition, profoundly affecting chip manufacturing yield. The showerhead imposes stringent machining requirements, with core critical parameters as follows:Hole diameter: tolerance controlled within ±0.005 mm to ensure flow consistency across every gas outlet hole. To address the high-precision micro-hole array machining challenges of showerheads, Ahno adopts a dedicated coolant-through bar stock substrate, optimizing tool thermal conductivity to effectively suppress cutting temperature rise, slow tool wear, and stabilize bore wall machining quality, helping customers achieve high-efficiency, high-consistency mass production of showerhead components.

0512-67067202

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Case Details

Micro-hole Drilling (Straight Holes)

1 mm Coolant-Through Deep-Hole Drill (Tool diagram)

Through custom non-standard tool geometry and dedicated coating, specifically optimized for through-holes in showerheads, achieving single-pass drilling capability that balances machining efficiency and micro-hole precision, enabling efficient mass production for customers.

Case Consultation

If you are interested in our products, please feel free to contact us to discuss potential collaboration.

Phone:0512-67067202
0512-62877712
Fax:+86-0512-62561293
Email:Info@ahno-tool.com
Address:No. 9 Kezhi Road, Suzhou Industrial Park

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